Statistics
Publications
1
Citations
16
H-Index
1
Active since
2001
Affiliations
Serguei Peredkov is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in sensitivity, optical materials, and radiation resistance.
Publications per year
2001–2001
1
1
<title>Deep x-ray lithography with the SU-8 resist</title>
Laurence Singleton, A. L. Bogdanov, Serguei Peredkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +11
1–1 of 1