Yoshihisa TANIMURA

The relationship between the measurement error and the arrangement of laser trackers in laser trilateration

Toshiyuki Takatsuji, Mitsuo Goto, Atsushi Kirita et al. · Measurement Science and Technology · 2000 · 67 citations

Engineering, Measurement, Education +16

The first measurement of a three-dimensional coordinate by use of a laser tracking interferometer system based on trilateration

Toshiyuki Takatsuji, Mitsuo Goto, Tomizo Kurosawa et al. · Measurement Science and Technology · 1998 · 64 citations

Sensor Calibration, First Measurement, Engineering +14

Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope

Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa et al. · Measurement Science and Technology · 2003 · 47 citations

Engineering, Microscopy, Measurement +22

Effects of phase changes on reflection and their wavelength dependence in optical profilometry

Takuma Doi, Kouji Toyoda, Yoshihisa TANIMURA · Applied Optics · 1997 · 46 citations

A metrological electron microscope system for microfeatures of very large scale integrated circuits

Takeshi Hatsuzawa, Kouji Toyoda, Yoshihisa TANIMURA · Review of Scientific Instruments · 1990 · 28 citations

Engineering, Electron-beam Lithography, Microscopy +20