S. Oyama

Statistics

Publications

Citations

H-Index

Active since

2008

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Hirose Electric (Japan)

S. Oyama is an author at National Institute of Advanced Industrial Science and Technology specializing in microfabrication, engineering, and electrical engineering.

Top concepts

EngineeringMicrofabricationElectrical EngineeringThin FilmsBiomedical DevicesBiomedical SensorsMechanical EngineeringMicroelectromechanical SystemsSensorsSensor Design

Publications per year

2008–2013

Publications

Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O<sub>3</sub> Thin Films

Takeshi Kobayashi, S. Oyama, Masaharu Takahashi et al. · Japanese Journal of Applied Physics · 2008 · 47 citations

Materials Science, Electrical Engineering, Biomedical Sensors +13

An electrostatic field sensor operated by self-excited vibration of MEMS-based self-sensitive piezoelectric microcantilevers

Takeshi Kobayashi, S. Oyama, Natsumi Makimoto et al. · Sensors and Actuators A Physical · 2013 · 31 citations

Electrical Engineering, Self-excited Vibration, Engineering +7

An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever

Takeshi Kobayashi, S. Oyama, Hironao Okada et al. · 2012 · 20 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +22

1–3 of 3