Concepedia

T-C Shen

TS

2

Publications

70

Citations

2

H-Index

1996

Active since

Affiliations

University of Illinois Urbana-Champaign(Current)

T-C Shen is an author at University of Illinois Urbana-Champaign specializing in nanotechnology, engineering, and applied physics.

Top concepts

EngineeringNanotechnologyApplied PhysicsNanoelectronicsMaterial SciencePhysicsHydrogenChemistryTechnologyNanostructures

Publications per year

1996–1996

2

Publications

2

Metal silicide patterning: a new approach to silicon nanoelectronics

J. R. Tucker, C Wang, T-C Shen · Nanotechnology · 1996 · 41 citations

Engineering, Integrated Circuits, Nanocomputing +17

Nanoscale patterning and selective chemistry of silicon surfaces by ultrahigh-vacuum scanning tunneling microscopy

Joseph W. Lyding, T-C Shen, G. C. Abeln et al. · Nanotechnology · 1996 · 29 citations

Engineering, Electron-beam Lithography, Chemistry +22

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