Th. Lill - Concepedia

Author

Th. Lill

University of Freiburg

Also Known As

TH. LILL, Th. Lill

Publications

368

Citations

H-Index

Concepts

All Affiliations

University of Freiburg Argonne National Laboratory

About

Th. Lill is an author at University of Freiburg specializing in engineering, physics, and surface science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	9	9	355
2	Natural Sciences	5	5	254
3	Applied Physics	5	5	184
4	Chemistry	5	5	193
5	Materials Engineering	3	3	52

Th. Lill

Publications

355

Citations

H-Index

Page 1

	Year	Citations
Near specular reflection of C60 ions in collisions with an HOPG graphite surface H.‐G. Busmann, Th. Lill, I. V. Hertel Chemical Physics Letters EngineeringPhysicsNatural SciencesSpectroscopySurface Science	1991	81
Collision induced fragmentation and resilience of scattered C60+ fullerenes H.‐G. Busmann, Th. Lill, Bjørn Anders Pettersson Reif, Surface Science EngineeringPhysicsNatural SciencesAtomic PhysicsFullerene	1992	76
Energy partition in collisions of C60+ ions with diamond (111) and graphite (0001) surfaces H.‐G. Busmann, Th. Lill, Bjørn Anders Pettersson Reif, The Journal of Chemical Physics EngineeringNuclear PhysicsChemistryHeavy Ion PhysicEnergy Partition	1993	51
Dynamics of C 60 + surface impact: Rolling, deformation, disintegration, and deposition on HOPG graphite Th. Lill, H.‐G. Busmann, Bjørn Anders Pettersson Reif, Applied Physics A Materials ScienceEngineeringImpact (Mechanics)C 60Mechanics	1992	37
The influence of the surface nature on scattering, fragmentation and deposition processes in C60+ collisions with solid surfaces Th. Lill, H.‐G. Busmann, F. Lacher, Chemical Physics Materials ScienceSurface CharacterizationEngineeringPhysicsDeposition Processes	1995	30
Dissociation of C+60 ions in collision with a Ni(100) surface Th. Lill, H.‐G. Busmann, Bjørn Anders Pettersson Reif, Surface Science EngineeringPhysicsNatural SciencesSurface ScienceAtomic Physics	1994	28
<i>In situ</i> measurement of aspect ratio dependent etch rates of polysilicon in an inductively coupled fluorine plasma Th. Lill, Michael Grimbergen, David Mui Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringCoupled Fluorine PlasmaVacuum DeviceSilicon On InsulatorSilicon Surface	2001	19
Cluster emission during sputtering of liquid gallium-aluminum eutectic alloy Th. Lill, W. F. Calaway, Michael J. Pellin Journal of Applied Physics Materials ScienceMaterials EngineeringAluminium NitrideCluster ScienceEngineering	1995	18
Sputtering of Group-IIIa elements. Properties of the metal cluster formation mechanism Th. Lill, W. F. Calaway, Z. Ma, Surface Science Materials EngineeringMaterials ScienceCluster ScienceMaterial AnalysisEngineering	1995	15

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