Concepedia

Min Seon Lee

MS

Statistics

Publications

1

Citations

15

H-Index

1

Active since

2014

Affiliations

Division of Materials Science and Engineering(Current)

Min Seon Lee is an author at Division of Materials Science and Engineering specializing in semiconductor surfaces, surface chemistry of solids, and chemical surface modification.

Publications per year

2014–2014

1

Publications

1

NF<sub>3</sub>/NH<sub>3</sub> Dry Cleaning Mechanism Inspired by Chemical and Physical Surface Modification of Si, SiO<sub>2</sub>, and Si<sub>3</sub>N<sub>4</sub>

Hoon Jung Oh, Ju Hee Lee, Min Seon Lee et al. · ECS Transactions · 2014 · 15 citations

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