Statistics
Publications
7
Citations
178
H-Index
7
Active since
1993
Affiliations
Hermann Groß is an author at Physikalisch-Technische Bundesanstalt specializing in natural sciences, engineering, and interferometry.
Publications per year
1993–2016
7
7
A SQUID measurement system for immunoassays
H. Matz, D. Drung, Stefan Hartwig et al. · Applied Superconductivity · 1999 · 68 citations
EUV and DUV scatterometry for CD and edge profile metrology on EUV masks
Bernd Bodermann, M. Wurm, Alexander C. Diener et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 17 citations
Natural Sciences, Materials Engineering, Materials Science +17
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