Statistics
Publications
1
Citations
14
H-Index
1
Active since
2021
Affiliations
T.-H. Lu is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in etching processes, integrated circuit design, and microelectronics.
Publications per year
2021–2021
1
1
S. W. Chang, T.-H. Lu, Chenyi Yang et al. · 2021 IEEE International Electron Devices Meeting (IEDM) · 2021 · 14 citations
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