Concepedia

Jiwon Son

JS

Statistics

Publications

2

Citations

24

H-Index

2

Active since

2007

Affiliations

Samsung (South Korea)(Current)

Jiwon Son is an author at Samsung (South Korea) specializing in materials science, microelectronics, and plasma etching.

Publications per year

2007–2022

2

Publications

2

Low-temperature plasma atomic layer etching of molybdenum via sequential oxidation and chlorination

Yebin Lee, Yong‐Jae Kim, Jiwon Son et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2022 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +14

A Highly Reliable Cu Interconnect Technology for Memory Device

H.B. Lee, Jungpyo Hong, Goan-Soo Seong et al. · 2007 · 11 citations

Engineering, Electrical Engineering, Materials Science +17

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