Tsuyoshi Fukuzawa

Simultaneous <i>in situ</i> measurements of properties of particulates in rf silane plasmas using a polarization-sensitive laser-light-scattering method

Masaharu Shiratani, Hiroharu Kawasaki, Tsuyoshi Fukuzawa et al. · Journal of Applied Physics · 1996 · 92 citations

Natural Sciences, Chemistry, Physics +17

Growth processes of particles in high frequency silane plasmas

Yukio Watanabe, Masaharu Shiratani, Hiroharu Kawasaki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 74 citations

Natural Sciences, Chemical Engineering, Physics +16

Particle Growth Kinetics in Silane RF Discharges

Masaharu Shiratani, Tsuyoshi Fukuzawa, Yukio Watanabe · Japanese Journal of Applied Physics · 1999 · 62 citations

Natural Sciences, Chemistry, Physics +13

Study on growth processes of particulates in helium-diluted silane rf plasmas using scanning electron microscopy

Masaharu Shiratani, Hiroharu Kawasaki, Tsuyoshi Fukuzawa et al. · Applied Physics Letters · 1994 · 56 citations

Natural Sciences, Chemistry, Physics +15

Contribution of short lifetime radicals to the growth of particles in SiH4 high frequency discharges and the effects of particles on deposited films

Yukio Watanabe, Masaharu Shiratani, Tsuyoshi Fukuzawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 51 citations

Natural Sciences, Materials Science, Physics +15