Statistics
Publications
1
Citations
11
H-Index
1
Active since
2019
Affiliations
Macronix International (Taiwan)(Current)
Cheng-Yi Lung is an author at Macronix International (Taiwan) specializing in plasma etching, hard mask etching, and polymer processing.
Publications per year
2019–2019
1
1
Study of Plasma Arcing Mechanism in High Aspect Ratio Slit Trench Etching
Yao-An Chung, Cheng-Yi Lung, Yuan-Chieh Chiu et al. · 2019 · 11 citations
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