Statistics
Publications
1
Citations
15
H-Index
1
Active since
2002
Affiliations
Inha University(Current)
Jae Hyun Han is an author at Inha University specializing in plasma-wall interactions, surface science, and electronic materials.
Publications per year
2002–2002
1
1
Study of Ru etching using O2/Cl2 helicon plasmas
Hyoun Woo Kim, Jae Hyun Han, Byong-Sun Ju et al. · Materials Science and Engineering B · 2002 · 15 citations
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