T. Itoh

Effect of Si-Ge buffer layer for low-temperature Si epitaxial growth on Si substrate by rf plasma chemical vapor deposition

Setsu Suzuki, T. Itoh · Journal of Applied Physics · 1983 · 44 citations

Natural Sciences, Materials Science, Physics +17

Heavily Arsenic‐Doped Silicon Epitaxial Films Grown by Partially Ionized MBE

Tetsuya Sugiyama, T. Itoh · Journal of The Electrochemical Society · 1986 · 19 citations

Engineering, Materials Engineering, Materials Science +17

Porous silicon layers and its oxide for the silicon-on-insulator structure

Hiroshi Takai, T. Itoh · Journal of Applied Physics · 1986 · 19 citations

Engineering, Materials Engineering, Materials Science +17

Atomic hydrogen etching of silicon-incorporated diamond-like carbon films prepared by pulsed laser deposition

H. Nakazawa, Hiroaki Sugita, Yoshiharu Enta et al. · Diamond and Related Materials · 2008 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +15

Gettering effect by oxygen implantation in SOS

Y. Yamamoto, I. H. Wilson, T. Itoh · Applied Physics Letters · 1979 · 12 citations

Engineering, Materials Engineering, Materials Science +15