Concepedia

Ingo Behrens

IB

Statistics

Publications

3

Citations

130

H-Index

3

Active since

2002

Affiliations

Technische Universität Braunschweig(Current)

Ingo Behrens is an author at Technische Universität Braunschweig specializing in microfabrication, engineering, and applied physics.

Top concepts

Publications per year

2002–2003

3

Publications

3

Piezoresistive cantilever as portable micro force calibration standard

Ingo Behrens, Lutz Doering, Erwin Peiner · Journal of Micromechanics and Microengineering · 2003 · 97 citations

, , +17

Growth of InP Layers on Nanometer-Scale Patterned Si Substrates

A. Bakin, D. Piester, Ingo Behrens et al. · Crystal Growth & Design · 2002 · 21 citations

, , +17

Micromachining of silicon carbide on silicon fabricated by low-pressure chemical vapour deposition

Ingo Behrens, Erwin Peiner, A. Bakin et al. · Journal of Micromechanics and Microengineering · 2002 · 12 citations

, , +19

1–3 of 3