Kazuma Shimada

Fabrication of large area diffraction grating using LIGA process

Daiji Noda, Makoto Tanaka, Kazuma Shimada et al. · Microsystem Technologies · 2008 · 64 citations

Engineering, Materials Engineering, Materials Science +11

Fabrication of Diffraction Grating with High Aspect Ratio Using X-ray Lithography Technique for X-ray Phase Imaging

Daiji Noda, Makoto Tanaka, Kazuma Shimada et al. · Japanese Journal of Applied Physics · 2007 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +14

Fabrication of High Aspect Ratio X-ray Grating Using X-ray Lithography

Daiji Noda, Hiroshi Tsujii, Kazuma Shimada et al. · Journal of Solid Mechanics and Materials Engineering · 2009 · 15 citations · Full text

Engineering, Biomedical Engineering, Manufacturing Engineering +13