Lorie Mae Baclea-an

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Active since

2012

Affiliations

Lawrence Berkeley National Laboratory(Current)

Lorie Mae Baclea-an is an author at Lawrence Berkeley National Laboratory specializing in materials science, surface science, and materials engineering.

Publications per year

2012–2012

Publications

The SEMATECH Berkeley MET: demonstration of 15-nm half-pitch in chemically amplified EUV resist and sensitivity of EUV resists at 6.x-nm

Chris Anderson, Dominic Ashworth, Lorie Mae Baclea-an et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +7

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