33
Publications
2.2K
Citations
12
H-Index
51
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 10 | 10 | 1.9K |
2 | Chemical Engineering | 7 | 7 | 142 |
3 | Applied Physics | 5 | 5 | 116 |
4 | Natural Sciences | 3 | 3 | 1.7K |
5 | Medicine | 1 | 1 | 15 |
Gregory Breyta
×
14
Publications
2.1K
Citations
12
H-Index
| Year | Citations | |
|---|---|---|
2001 | 1.7K | |
2000 | 157 | |
2000 | 49 | |
2001 | 41 | |
Lithographic performance of an environmentally stable chemically amplified photoresist (ESCAP) Will Conley, Gregory Breyta, William R. Brunsvold, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringElectron-beam LithographyResponsive PolymersPhotoresist Images | 1996 | 21 |
1996 | 20 | |
1993 | 19 | |
2002 | 18 | |
2000 | 16 | |
2016 | 15 |
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