Gregory Breyta

Experimental realization of Shor's quantum factoring algorithm using nuclear magnetic resonance

Lieven M. K. Vandersypen, Matthias Steffen, Gregory Breyta et al. · Nature · 2001 · 1.7K citations · Full text

Quantum Science, Engineering, Quantum Computing +9

Experimental Realization of an Order-Finding Algorithm with an NMR Quantum Computer

Lieven M. K. Vandersypen, Matthias Steffen, Gregory Breyta et al. · Physical Review Letters · 2000 · 157 citations · Full text

Effect of resist components on image spreading during postexposure bake of chemically amplified resists

William D. Hinsberg, Frances A. Houle, Martha I. Sanchez et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 49 citations

Postexposure Bake, Engineering, Electron-beam Lithography +21

Polymer design for 157-nm chemically amplified resists

Hiroshi Itô, Gregory M. Wallraff, Phillip J. Brock et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 41 citations

Materials Science, Polymer Material, Engineering +13

Lithographic performance of an environmentally stable chemically amplified photoresist (ESCAP)

Will Conley, Gregory Breyta, William R. Brunsvold et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 21 citations

Optical Materials, Engineering, Electron-beam Lithography +17