Concepedia

Chang Hyun Oh

CH

Statistics

Publications

1

Citations

15

H-Index

1

Active since

2002

Affiliations

Sungkyunkwan University(Current)

Chang Hyun Oh is an author at Sungkyunkwan University specializing in environmental engineering, chemical engineering, and chemical kinetics.

Top concepts

ChemistryEngineeringApplied PhysicsSurface ScienceChemical KineticsChemical EngineeringElectrical EngineeringEnvironmental Engineering

Publications per year

2002–2002

1

Publications

1

C<sub>4</sub>F<sub>8</sub>O/O<sub>2</sub>/N-based Additive Gases for Silicon Nitride Plasma Enhanced Chemical Vapor Deposition Chamber Cleaning with Low Global Warming Potentials

Ji Hwang Kim, Jeong Woon Bae, Chang Hyun Oh et al. · Japanese Journal of Applied Physics · 2002 · 15 citations

Chemical Engineering, Electrical Engineering, Lower Mmtce +12

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