5
Publications
73
Citations
5
H-Index
2003
Active since
Affiliations
Shih Chun Tseng is an author at Industrial Technology Research Institute specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceThermoelectricsMaterials EngineeringMicroscopyNanomaterialsNanotechnologyThermodynamicsNanoelectronics
Publications per year
2003–2014
5
5
Electron beam lithography on cylindrical roller
Shih Chun Tseng, Wen Yang Peng, Yi-Fan Hsieh et al. · Microelectronic Engineering · 2009 · 16 citations
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