Chun-Hui Yang

Effects of oxygen addition on physical properties of ZnO thin film grown by radio frequency reactive magnetron sputtering

Che-Wei Hsu, Tsung‐Chieh Cheng, Chun-Hui Yang et al. · Journal of Alloys and Compounds · 2010 · 66 citations

Materials Engineering, Materials Science, Engineering +7

Characteristics of Atomic-Layer-Deposited Al[sub 2]O[sub 3] High-k Dielectric Films Grown on Ge Substrates

Chao-Ching Cheng, Chao-Hsin Chien, Guang-Li Luo et al. · Journal of The Electrochemical Society · 2008 · 41 citations

Aluminium Nitride, Engineering, Thin Film Process Technology +16

Study of Thermal Stability of HfO[sub x]N[sub y]∕Ge Capacitors Using Postdeposition Annealing and NH[sub 3] Plasma Pretreatment

Chao-Ching Cheng, Chao-Hsin Chien, Guang-Li Luo et al. · Journal of The Electrochemical Society · 2007 · 21 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Ultrathin Si capping layer suppresses charge trapping in HfOxNy∕Ge metal-insulator-semiconductor capacitors

Chao-Ching Cheng, Chao‐Hsin Chien, Guang-Li Luo et al. · Applied Physics Letters · 2007 · 15 citations

Engineering, Ge Substrate, Silicon On Insulator +16

Improved Electrical Properties of Gd[sub 2]O[sub 3]∕GaAs Capacitor with Modified Wet-Chemical Clean and Sulfidization Procedures

Chao-Ching Cheng, Chao‐Hsin Chien, Guang-Li Luo et al. · Journal of The Electrochemical Society · 2008 · 14 citations · Full text

Engineering, Semiconductor Device, Chemical Engineering +16