Concepedia

Tomohiro Kitagawa

TK

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Publications

2

Citations

55

H-Index

2

Active since

2005

Affiliations

Kyoto University(Current)

Tomohiro Kitagawa is an author at Kyoto University specializing in engineering, applied physics, and microelectronics.

Top concepts

Publications per year

2005–2006

2

Publications

2

Etching of High-k Dielectric HfO<sub>2</sub> Films in BCl<sub>3</sub>-Containing Plasmas Enhanced with O<sub>2</sub> Addition

Tomohiro Kitagawa, K. Nakamura, Kazushi Osari et al. · Japanese Journal of Applied Physics · 2006 · 29 citations

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Plasma etching of high-k and metal gate materials

K. Nakamura, Tomohiro Kitagawa, Kazushi Osari et al. · Vacuum · 2005 · 26 citations

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