Concepedia
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Publications
1
Citations
10
H-Index
Active since
1999
Affiliations
VTT Technical Research Centre of Finland(Current)
Jyrki Kiiham ki is an author at VTT Technical Research Centre of Finland.
Publications per year
1999–1999
Deep Silicon Etching in Inductively Coupled Plasma Reactorfor MEMS
Jyrki Kiiham ki, Sami Franssila · Physica Scripta · 1999 · 10 citations
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