Statistics
Publications
1
Citations
54
H-Index
1
Active since
1994
Affiliations
Hokkaido University(Current)
Y. Hirohata is an author at Hokkaido University specializing in nitride thin films, semiconductor thin films, and thin films.
Publications per year
1994–1994
1
1
Properties of silicon nitride films prepared by magnetron sputtering
Y. Hirohata, Norio Shimamoto, Tomoaki Hino et al. · Thin Solid Films · 1994 · 54 citations
Natural Sciences, Materials Engineering, Materials Science +14
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