H. M. Choi

Influence of film density on residual stress and resistivity for Cu thin films deposited by bias sputtering

H. M. Choi, Sie-Young Choi, O. Anderson et al. · Thin Solid Films · 2000 · 56 citations

Materials Engineering, Materials Science, Cu Thin Films +11

A study on the crystallographic orientation with residual stress and electrical property of Al films deposited by sputtering

S.P. Kim, H. M. Choi, Sie-Young Choi · Thin Solid Films · 1998 · 49 citations

Materials Science, Materials Engineering, Aluminium Nitride +12

Intrinsic stress and its relaxation in diamond film deposited by hot filament chemical vapor deposition

Sengkwan Choi, Duk−Young Jung, H. M. Choi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 31 citations · Full text

Materials Science, Diamond-like Carbon, Diamond Film +10

Origin of intrinsic stress in Y2O3 films deposited by reactive sputtering

H. M. Choi, Sengkwan Choi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 22 citations

Optical Materials, Engineering, Thin Film Process Technology +16

Effects of oxidation process on interface roughness of gate oxides on silicon: X-ray reflectivity study

S. Banerjee, Yong Joon Park, Dong Ryeol Lee et al. · Applied Physics Letters · 1998 · 17 citations

Engineering, Dry Oxidation, Silicon On Insulator +16