Concepedia

Yusuke Komura

YK

Statistics

Publications

8

Citations

142

H-Index

8

Active since

2007

Affiliations

Nagoya University(Current)

Gifu University

Semiconductor Energy Laboratory (Japan)

Yusuke Komura is an author at Nagoya University specializing in chemical vapor deposition, materials science, and silicon carbide.

Publications per year

2007–2024

8

Publications

8

Preparation of nanocrystalline cubic silicon carbide thin films by hot-wire CVD at various filament-to-substrate distances

Akimori Tabata, Yusuke Komura · Surface and Coatings Technology · 2007 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +14

Film Properties of Nanocrystalline 3C–SiC Thin Films Deposited on Glass Substrates by Hot-Wire Chemical Vapor Deposition Using CH<sub>4</sub> as a Carbon Source

Yusuke Komura, Akimori Tabata, Tomoki Narita et al. · Japanese Journal of Applied Physics · 2007 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +16

Influence of gas pressure on low-temperature preparation and film properties of nanocrystalline 3C-SiC thin films by HW-CVD using SiH4/CH4/H2 system

Yusuke Komura, Akimori Tabata, Tomoki Narita et al. · Thin Solid Films · 2007 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth of silicon carbide thin films by hot-wire chemical vapor deposition from SiH4/CH4/H2

Akimori Tabata, Yusuke Komura, Tomoki Narita et al. · Thin Solid Films · 2009 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +14

Properties of Nanocrystalline Cubic Silicon Carbide Thin Films Prepared by Hot-Wire Chemical Vapor Deposition Using SiH<sub>4</sub>/CH<sub>4</sub>/H<sub>2</sub> at Various Substrate Temperatures

Akimori Tabata, Yusuke Komura, Yoshiki Hoshide et al. · Japanese Journal of Applied Physics · 2008 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +16

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