E. V. Kurganova is an author at University of Twente specializing in applied physics, microfabrication, and surface science.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationElectronic Packaging
Publications per year
2017–2017
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Pellicle films supporting the ramp to HVM with EUV
Pieter Jan van Zwol, Maxim Nasalevich, E. V. Kurganova et al. · 2017 · 45 citations
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