Katsumi TAKIGUCHI

Statistics

Publications

Citations

H-Index

Active since

1988

Affiliations

Technology Research Institute of Osaka Prefecture(Current)

Katsumi TAKIGUCHI is an author at Technology Research Institute of Osaka Prefecture specializing in ceramic materials, materials science, and sputtering processes.

Publications per year

1988–1990

Publications

Effects of oxygen pressure in reactive ion beam sputter deposition of zirconium oxides

Masaaki Yoshitake, Katsumi TAKIGUCHI, Yoshihiko Suzuki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +13

Synthesis of Zr–N Thin Film by Reactive Ion Beam Sputtering

Masaaki Yoshitake, Tsutom Yotsuya, Katsumi TAKIGUCHI et al. · Japanese Journal of Applied Physics · 1990 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +15

1–2 of 2