Statistics
Publications
7
Citations
380
H-Index
7
Active since
2000
Affiliations
P. Fluckiger is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, electrical engineering, and microfabrication.
Publications per year
2000–2007
7
7
Silicon sacrificial layer dry etching (SSLDE) for free-standing RF MEMS architectures
S. Frederico, C. Hibert, R. Fritschi et al. · 2003 · 40 citations · Full text
1–5 of 7