Taka-aki Miura

Kinetics of oxidation on hydrogen-terminated Si(100) and (111) surfaces stored in air

Taka-aki Miura, Michio Niwano, Daisei Shoji et al. · Journal of Applied Physics · 1996 · 114 citations

Surface Characterization, Chemical Engineering, Engineering +14

Real-time, <i>in</i> <i>situ</i> infrared study of etching of Si(100) and (111) surfaces in dilute hydrofluoric acid solution

Michio Niwano, Taka-aki Miura, Yasuo Kimura et al. · Journal of Applied Physics · 1996 · 45 citations

Materials Science, Surface Characterization, Engineering +13

Initial stages of oxidation of hydrogen-terminated Si surface stored in air

Taka-aki Miura, Michio Niwano, Daisei Shoji et al. · Applied Surface Science · 1996 · 28 citations

Chemical Engineering, Engineering, Surface Chemistry +9

Effects of surface chemical treatment on the formation of metal GaAs interfaces

Daisei Shoji, Masanori Shinohara, Taka-aki Miura et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 10 citations

Materials Science, Onto Gaas, Ii-vi Semiconductor +14