I. Chakarov

Round Robin computer simulation of ejection probability in sputtering

Peter Sigmund, M. T. Robinson, M. I. Baskes et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 87 citations

Computing, Computer Engineering, Computer Science +6

Electrical activation and electron spin coherence of ultralow dose antimony implants in silicon

T. Schenkel, J. Alexander Liddle, Arun Persaud et al. · Applied Physics Letters · 2006 · 78 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Dynamic Monte-Carlo simulation of compositional change and atomic redistribution in multicomponent targets under ion bombardment

I. Chakarov, S. S. Todorov, D.S. Karpuzov · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +17

On the mechanism of sputtering of SiO2 by Ar at ion energies near the sputtering threshold

S. S. Todorov, I. Chakarov · Vacuum · 1989 · 20 citations

Natural Sciences, Materials Science, Physics +12

Computer simulations of surface analysis using ion beams

V. A. Ignatova, D.S. Karpuzov, I. Chakarov et al. · Progress in Surface Science · 2006 · 19 citations

Natural Sciences, Materials Science, Physics +16