J R Pekelsky

Uncertainty evaluation for the measurement of gauge blocks by optical interferometry

J E Decker, J R Pekelsky · Metrologia · 1997 · 72 citations

Engineering, Measurement, Uncertainty Evaluation +19

Imaging laser diffractometer for traceable grating pitch calibration

J R Pekelsky, B J Eves, Paola Nisticò et al. · Measurement Science and Technology · 2007 · 29 citations

Engineering, Optic Design, Optical Testing +21

Traceable 3D imaging metrology

J.‐A. Beraldin, Marc Rioux, Luc Cournoyer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 26 citations

Engineering, Microscopy, Measurement +26

Report on an international comparison of one-dimensional (1D) grating pitch

J E Decker, Egbert Buhr, Alexander C. Diener et al. · Metrologia · 2009 · 15 citations

Optical Diffraction, Engineering, Measurement +6

Evaluation of uncertainty in grating pitch measurement by optical diffraction using Monte Carlo methods

J E Decker, B J Eves, J R Pekelsky et al. · Measurement Science and Technology · 2010 · 14 citations

Engineering, Pitch Measurement, Measurement +19