Concepedia

Tetsuya Yoshikawa

TY

Statistics

Publications

3

Citations

63

H-Index

3

Active since

2001

Affiliations

Kobe Steel (Japan)(Current)

Takasago (Japan)

Tetsuya Yoshikawa is an author at Kobe Steel (Japan) specializing in engineering, materials engineering, and applied physics.

Top concepts

Publications per year

2001–2003

3

Publications

3

Hydrogen Promoted Copper Migration in the High Pressure Anneal Process

Takao Fujikawa, Tetsuya Yoshikawa, Takashi Ohnishi et al. · Japanese Journal of Applied Physics · 2001 · 33 citations

, , +18

Effects of the high-pressure annealing process on the reflow phenomenon of copper interconnections for large scale integrated circuits

Takashi Onishi, Hideo Fujii, Tetsuya Yoshikawa et al. · Thin Solid Films · 2003 · 19 citations

, , +11

Application of High-pressure Annealing Process to Dual Damascene Copper Interconnections

Takashi Onishi, Tetsuya Yoshikawa · MATERIALS TRANSACTIONS · 2002 · 11 citations · Full text

, , +12

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