G. S. Chen

Electron-beam-induced damage in amorphous SiO₂and the direct fabrication of silicon nanostructures

G. S. Chen, C. B. Boothroyd, C. J. Humphreys · Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1998 · 55 citations

Engineering, Materials Engineering, Materials Science +17

Evaluation of radio-frequency sputter-deposited textured TiN thin films as diffusion barriers between copper and silicon

G. S. Chen, Junji Guo, Chung‐Kwei Lin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +17

Texture and Microstructure Development of RF Sputter-Deposited Polycrystalline Lithium Transition Metal Oxide Thin Films

Kuo‐Feng Chiu, Fu‐Chiun Hsu, G. S. Chen et al. · Journal of The Electrochemical Society · 2003 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +14

Crystallization and failure behavior of Ta-Ni nanostructured/amorphous diffusion barriers for copper metallization

Jau-Shiung Fang, Ting-Chang Hsu, G. S. Chen · Journal of Electronic Materials · 2004 · 21 citations

Engineering, Materials Engineering, Materials Science +16

Structural Evolution and Stability of RF Sputter Deposited Li[sub x]Mn[sub 2−y]O[sub 4] Thin Film Cathodes

Kuo‐Feng Chiu, H. H. Hsiao, G. S. Chen et al. · Journal of The Electrochemical Society · 2004 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +17