Y. H. Cheng

Substrate bias dependence of Raman spectra for TiN films deposited by filtered cathodic vacuum arc

Y. H. Cheng, Beng Kang Tay, Shu Ping Lau et al. · Journal of Applied Physics · 2002 · 109 citations

Materials Science, Raman Spectra, Tin Films +14

Hard carbon nanocomposite films with low stress

Beng Kang Tay, Y. H. Cheng, X. Ding et al. · Diamond and Related Materials · 2001 · 95 citations

Materials Science, Engineering, Carbon-based Material +3

On the deposition mechanism of a-C:H films by plasma enhanced chemical vapor deposition

Y. H. Cheng, Yiping Wu, J.G. Chen et al. · Surface and Coatings Technology · 2000 · 39 citations

Materials Science, Engineering, Deposition Mechanism +6

Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

Y. H. Cheng, Beng Kang Tay, Shu Ping Lau et al. · Applied Physics A · 2001 · 34 citations

Radio-frequency Nitrogen-ion Beam, Chemical Engineering, Engineering +7

Influence of deposition temperature on the structure and internal stress of TiN films deposited by filtered cathodic vacuum arc

Y. H. Cheng, Beng Kang Tay, Shu Ping Lau · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 33 citations

Crystal Structure, Engineering, Thin Film Process Technology +16