Statistics
Publications
1
Citations
30
H-Index
1
Active since
2004
Affiliations
Tokyo University of Science(Current)
Masamichi Iida is an author at Tokyo University of Science specializing in mask fabrication, materials engineering, and imprint lithography.
Publications per year
2004–2004
1
1
3D imprint technology using substrate voltage change
Jun Taniguchi, Masamichi Iida, T Miyazawa et al. · Applied Surface Science · 2004 · 30 citations
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