Concepedia

Yeung Joon Sohn

YJ

Statistics

Publications

3

Citations

46

H-Index

3

Active since

1998

Affiliations

National Institute of Standards and Technology(Current)

Yeung Joon Sohn is an author at National Institute of Standards and Technology specializing in optics, optical metrology, and angle measurement.

Publications per year

1998–2009

3

Publications

3

Portable autocollimators using the laser diode and the position sensitive detector

Yeung Joon Sohn, Jin Hyuk Kwon, Ok Shik Choe et al. · Review of Scientific Instruments · 1998 · 18 citations

, , +16

Koehler illumination in high-resolution optical metrology

Yeung Joon Sohn, Brian M. Barnes, Lowell P. Howard et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 15 citations

, , +9

193 nm angle-resolved scatterfield microscope for semiconductor metrology

Yeung Joon Sohn, Richard Quintanilha, Brian M. Barnes et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 13 citations

, , +14

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