Concepedia

Shigeyuki Uzawa

SU

1

Publications

40

Citations

1

H-Index

2007

Active since

Affiliations

Canon (Japan)(Current)

Shigeyuki Uzawa is an author at Canon (Japan) specializing in instrumentation, computer engineering, and synchrotron radiation.

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Publications per year

2007–2007

1

Publications

1

Path to the HVM in EUVL through the development and evaluation of the SFET

Shigeyuki Uzawa, Hiroyoshi Kubo, Yoshinori Miwa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 40 citations

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