Hele Väinölä

Experimental and theoretical study of heterogeneous iron precipitation in silicon

Antti Haarahiltunen, Hele Väinölä, Olli Anttila et al. · Journal of Applied Physics · 2007 · 58 citations · Full text

Materials Science, Chemical Engineering, Sintering +15

Sensitive Copper Detection in P-type CZ Silicon using μPCD

Hele Väinölä, Marko Yli‐Koski, Antti Haarahiltunen et al. · Journal of The Electrochemical Society · 2003 · 31 citations

Chemical Engineering, Electrical Engineering, Copper Oxide Materials +14

Quantitative copper measurement in oxidized p-type silicon wafers using microwave photoconductivity decay

Hele Väinölä, E. Saarnilehto, Marko Yli‐Koski et al. · Applied Physics Letters · 2005 · 27 citations · Full text

Semiconductor Technology, Electrical Engineering, Engineering +15

Gettering in silicon-on-insulator wafers: experimental studies and modelling

A. A. Istratov, Hele Väinölä, W. Huber et al. · Semiconductor Science and Technology · 2005 · 22 citations

Engineering, Silicon On Insulator, Device Area +16

Thermal stability of internal gettering of iron in silicon and its impact on optimization of gettering

Peng Zhang, Hele Väinölä, A. A. Istratov et al. · Applied Physics Letters · 2003 · 19 citations · Full text

Magnetic Properties, Engineering, Mechanical Engineering +18