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Z.R Song

ZS

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Publications

1

Citations

11

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1

Active since

2004

Affiliations

Shanghai Institute of Microsystem and Information Technology(Current)

Z.R Song is an author at Shanghai Institute of Microsystem and Information Technology specializing in materials engineering, surface science, and materials science.

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Publications per year

2004–2004

1

Publications

1

Simulation and characterization on properties of AlN films for SOI application

Z.R Song, Y.H. Yu, Song Zou et al. · Thin Solid Films · 2004 · 11 citations

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