Statistics
Publications
2
Citations
30
H-Index
2
Active since
2002
Affiliations
Katsuhiro Sasada is an author at Hitachi High-Tech (Japan) specializing in electron beam lithography, semiconductor metrology, and surface metrology.
Publications per year
2002–2005
2
2
Chie Shishido, Yuji Takagi, Maki Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 14 citations
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