Justin R. Alexander

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Active since

2014

Affiliations

The University of Texas at Dallas(Current)

Justin R. Alexander is an author at The University of Texas at Dallas specializing in feature size control, silicon etching, and atomic layer deposition.

Publications per year

2014–2014

Publications

Pattern transfer of hydrogen depassivation lithography patterns into silicon with atomically traceable placement and size control

Joshua B. Ballard, James H. G. Owen, William R. Owen et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 24 citations

Engineering, Materials Engineering, Materials Science +17

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