Tadashi Saitoh Tadashi Saitoh

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Active since

1996

Affiliations

Tokyo University of Agriculture and Technology(Current)

Tadashi Saitoh Tadashi Saitoh is an author at Tokyo University of Agriculture and Technology specializing in engineering, semiconductor interfaces, and semiconductor surfaces.

Publications per year

1996–1998

Publications

Improvement of SiO 2 Properties and Silicon Surface Passivation by Heat Treatment with High-Pressure H 2O Vapor

Toshiyuki Sameshima, Keiji Sakamoto, Yoshiyuki Tsunoda Yoshiyuki Tsunoda et al. · Japanese Journal of Applied Physics · 1998 · 31 citations

Engineering, Materials Engineering, Materials Science +17

Effect of Hydrogen-Radical Annealing for SiO2 Passivation

Hiroshi Nagayoshi, Yuichi Onozawa, Makoto Ikeda et al. · Japanese Journal of Applied Physics · 1996 · 23 citations

Engineering, Materials Engineering, Materials Science +17

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