Kimitake Fukushima

Fabrication of single-crystal Si cantilever array

Daisuke Saya, Kimitake Fukushima, Hiroshi Toshiyoshi et al. · Sensors and Actuators A Physical · 2002 · 48 citations

Materials Science, Wafer Scale Processing, Engineering +4

Millions of cantilevers for atomic force microscopy

Hideki Kawakatsu, Daisuke Saya, Atsushi Kato et al. · Review of Scientific Instruments · 2002 · 48 citations

Atomic Force Microscopy, Engineering, Microscopy +19

Development of a Versatile Atomic Force Microscope within a Scanning Electron Microscope

Kimitake Fukushima, Daisuke Saya, Hideki Kawakatsu · Japanese Journal of Applied Physics · 2000 · 28 citations

Afm Module, Engineering, Microscopy +17

Fabrication of Silicon-Based Filiform-Necked Nanometric Oscillators

Daisuke Saya, Kimitake Fukushima, Hiroshi Toshiyoshi et al. · Japanese Journal of Applied Physics · 2000 · 14 citations

Elastic Neck, Engineering, Oscillators +16

Measurement of mechanical properties of three-dimensional nanometric objects by an atomic force microscope incorporated in a scanning electron microscope

Kimitake Fukushima, Shigeki Kawai, Daisuke Saya et al. · Review of Scientific Instruments · 2002 · 12 citations

Engineering, Afm Tip, Microscopy +18