Statistics
Publications
3
Citations
58
H-Index
3
Active since
2022
Yunyi Chen is an author at Shanghai Institute of Optics and Fine Mechanics specializing in energy storage, electrochemistry, and electrical engineering.
Publications per year
2022–2025
3
3
Improving accuracy and sensitivity of diffraction-based overlay metrology
Wenhe Yang, Nan Lin, Xin Wei et al. · Chinese Optics Letters · 2023 · 10 citations · Full text
1–3 of 3