Dongqing Pan

On the physical and chemical details of alumina atomic layer deposition: A combined experimental and numerical approach

Dongqing Pan, Lulu Ma, Yuanyuan Xie et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 56 citations

Aluminium Nitride, Engineering, Chemical Deposition +17

Effects of gap size, temperature and pumping pressure on the fluid dynamics and chemical kinetics of in-line spatial atomic layer deposition of Al2O3

Dongqing Pan, Tien‐Chien Jen, Chris Yuan · International Journal of Heat and Mass Transfer · 2016 · 40 citations

Materials Science, Materials Engineering, Chemical Engineering +11

Atomic Layer Deposition of Alumina Coatings onto SnS2 for Lithium-Ion Battery Applications

Dongsheng Guan, Lulu Ma, Dongqing Pan et al. · Electrochimica Acta · 2017 · 37 citations

Materials Science, Engineering, Surface Science +9

Mechanistic modeling of atomic layer deposition of alumina process with detailed surface chemical kinetics

Yuanyuan Xie, Lulu Ma, Dongqing Pan et al. · Chemical Engineering Journal · 2014 · 31 citations

Materials Engineering, Materials Science, Chemical Engineering +13

Numerical modeling of carrier gas flow in atomic layer deposition vacuum reactor: A comparative study of lattice Boltzmann models

Dongqing Pan, Tao Li, Tien‐Chien Jen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 29 citations

Engineering, Fluid Mechanics, Reactor Physics +22