Tuomas Hänninen

SiN_<i>x</i> Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content

Susann Schmidt, Tuomas Hänninen, Cecilia Goyenola et al. · ACS Applied Materials & Interfaces · 2016 · 32 citations · Full text

Magnetic Properties, Engineering, Chemical Deposition +19

SiNx coatings deposited by reactive high power impulse magnetron sputtering: Process parameters influencing the residual coating stress

Susann Schmidt, Tuomas Hänninen, Jonas Wissting et al. · Journal of Applied Physics · 2017 · 29 citations · Full text

Tribological Coating, Engineering, Reactive Hipims +19

Silicon oxynitride films deposited by reactive high power impulse magnetron sputtering using nitrous oxide as a single-source precursor

Tuomas Hänninen, Susann Schmidt, Jens Jensen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 19 citations · Full text

Materials Science, Materials Engineering, Chemical Engineering +14

Silicon carbonitride thin films deposited by reactive high power impulse magnetron sputtering

Tuomas Hänninen, Susann Schmidt, Ivan G. Ivanov et al. · Surface and Coatings Technology · 2017 · 14 citations

Materials Engineering, Materials Science, Engineering +6