Concepedia

Y. S. Chiu

YS

Statistics

Publications

2

Citations

57

H-Index

2

Active since

2010

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Y. S. Chiu is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in dielectric breakdown, semiconductor device materials, and thermal stability.

Publications per year

2010–2010

2

Publications

2

Thermal stability of TiN metal gate prepared by atomic layer deposition or physical vapor deposition on HfO2 high-K dielectric

Lei Wu, H.Y. Yu, X. Li et al. · Applied Physics Letters · 2010 · 47 citations

, , +17

Investigation of ALD or PVD (Ti-rich vs. N-rich) TiN metal gate thermal stability on HfO<inf>2</inf> high-K

Lei Wu, H.Y. Yu, X. Li et al. · 2010 · 10 citations

, , +17

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