Concepedia

X. Li

XL

1

Publications

10

Citations

1

H-Index

2010

Active since

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

X. Li is an author at Taiwan Semiconductor Manufacturing Company (Taiwan).

Publications per year

2010–2010

1

Publications

1

Investigation of ALD or PVD (Ti-rich vs. N-rich) TiN metal gate thermal stability on HfO<inf>2</inf> high-K

Lei Wu, H.Y. Yu, X. Li et al. · 2010 · 10 citations

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