Kwang-Woo Choi

Band offsets of atomic-layer-deposited Al2O3 on GaAs and the effects of surface treatment

Nhan V. Nguyen, Oleg A. Kirillov, Wen Jiang et al. · Applied Physics Letters · 2008 · 75 citations

Aluminium Nitride, Engineering, Optoelectronic Devices +20

Characterization of the Photoacid Diffusion Length and Reaction Kinetics in EUV Photoresists with IR Spectroscopy

Shuhui Kang, Wen‐Li Wu, Kwang-Woo Choi et al. · Macromolecules · 2010 · 58 citations

Optical Materials, Engineering, Kinetics Parameters +23

Nonplanar high-k dielectric thickness measurements using CD-SAXS

Chengqing Wang, Kwang-Woo Choi, Yi-Ching Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 18 citations

Fundamentals of the reaction-diffusion process in model EUV photoresists

Kristopher A. Lavery, Kwang-Woo Choi, Bryan D. Vogt et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

Optical Materials, Engineering, Beam Lithography +17

Effect of photo-acid generator concentration and developer strength on the patterning capabilities of a model EUV photoresist

Kwang-Woo Choi, Vivek M. Prabhu, Kristopher A. Lavery et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +17