Concepedia

Chih-Tsung Shih

CS

Statistics

Publications

1

Citations

11

H-Index

1

Active since

2015

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Chih-Tsung Shih is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in physical optics, absorber materials, and contrast sensitivity.

Publications per year

2015–2015

1

Publications

1

Mitigation of image contrast loss due to mask-side non-telecentricity in an EUV scanner

Chih-Tsung Shih, Shinn-Sheng Yu, Yen-Cheng Lu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 11 citations

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